IEC 62047-34 Ed. 1.0 en:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

International Electrotechnical Commission , 04/05/2019

Publisher: IEC

File Format: PDF

$47.00$95.00

Description

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

Published: 04/05/2019

Pages: 16

File Size: 1 file , 1.2 MB

Language: English

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