ASTM F1709-97(2016)

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

ASTM International , 05/01/2016

Publisher: ASTM

File Format: PDF

$33.00$66.00

Description

1.1This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Published: 05/01/2016

Pages: 3

File Size: 1 file , 66 KB

Language: English

Note: This product is unavailable in Russia, Ukraine, Belarus

ASTM F1709-97(2016) History

ASTM F1709-97(2016)

$33.00 $66.00

ASTM F1709-97(2008)

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