DIN 32567-5

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

Deutsches Institut Fur Normung E.V. (German National Standard) , 06/01/2015

Publisher: DIN

File Format: PDF

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Published: 06/01/2015

Pages: 18

File Size: 1 file

Language: German

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