DIN 50450-9:2021

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Deutsches Institut Fur Normung E.V. (German National Standard) , 07/01/2021

Publisher: DIN

File Format: PDF

$22.00$44.00

Description

DIN 50450-9 PDF

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Published: 07/01/2021

Pages: 8

File Size: 1 file

Language: German

Note: This product is unavailable in Ukraine, Russia, Belarus