IEC 62047-1 Ed. 1.0 b:2005

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

International Electrotechnical Commission , 09/27/2005

Publisher: IEC

File Format: PDF

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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Published: 09/27/2005

Pages: 49

File Size: 1 file , 690 KB

Language: English, French

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